Gate dielectric protection for transistors

ABSTRACT

At least one method, apparatus and system disclosed herein involves forming a device comprising a transistor comprising an active gate and at least one inactive gate in parallel to the active gate. A source region on a substrate is formed. An active gate region is formed on the substrate adjacent the source region. A drain region is formed on the substrate adjacent the active gate region. A first inactive gate region is formed on the substrate in parallel to the active gate region. The source region, the drain region, the active gate region, and the first inactive gate region comprise the transistor. The first inactive gate region is capable of dissipating the at least a portion of a charge.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Generally, the present disclosure relates to the manufacture ofsophisticated semiconductor devices, and, more specifically, to variousmethods and structures for reducing charges induced by external factors,such as plasma processing.

2. Description of the Related Art

The technology explosion in the manufacturing industry has resulted inmany new and innovative manufacturing processes. Today's manufacturingprocesses, particularly semiconductor manufacturing processes, call fora large number of important steps. These process steps are usuallyvital, and therefore, require a number of inputs that are generallyfine-tuned to maintain proper manufacturing control.

The manufacture of semiconductor devices requires a number of discreteprocess steps to create a packaged semiconductor device from rawsemiconductor material. The various processes, from the initial growthof the semiconductor material, the slicing of the semiconductor crystalinto individual wafers, the fabrication stages (etching, doping, ionimplanting, or the like), to the packaging and final testing of thecompleted device, are so different from one another and specialized thatthe processes may be performed in different manufacturing locations thatcontain different control schemes.

Generally, a set of processing steps is performed on a group ofsemiconductor wafers, sometimes referred to as a lot, usingsemiconductor-manufacturing tools, such as exposure tool or a stepper.As an example, an etch process may be performed on the semiconductorwafers to shape objects on the semiconductor wafer, such as polysiliconlines, each of which may function as a gate electrode for a transistor.As another example, a plurality of metal lines, e.g., aluminum orcopper, may be formed that serve as conductive lines that connect oneconductive region on the semiconductor wafer to another.

Various processes are performed on semiconductor substrates inmanufacturing integrated circuit products. Some of these processes maybe plasma based processing. For example, plasma processing insemiconductor manufacturing may include chemical vapor deposition (CVD),etching, dry cleaning (instead of wet chemical rinsing), etc. Plasmaprocessing involves creating partially ionized gas by applying anelectric filed. Ions can be accelerated, resulting ion bombardment of awafer surface. This bombardment provides for plasma etching by directmeans (sputtering, ion beam milling) or by indirect means by assistingchemical etching. Generally, positive ion-electron pairs are created byionization reactions, however, accumulation of charges generally occurwhen using plasma processing. These charges may cause damage to circuits(e.g., transistors) formed on semiconductor wafers.

When integrated circuits are formed, tests are performed to determinethe correctness in the operation of the circuits. For electrical testingof a discrete transistor (e.g., field effect transistor (FET)), thegate, source, and drain of the transistor are typically connected toprobe pads. In order to reduce plasma processing induced damage of gatedielectric during the fabrication process or in the testing process,protection diodes are typically connected in parallel to the transistor.

Turning now to FIG. 1, a stylized depiction of a prior art integratedcircuit device is illustrated. FIG. 1 illustrates a field-effecttransistor (FET) that is formed on a substrate 105, e.g., a p-typesilicon substrate. Various shallow trench isolation (STI) 107 regionsare formed. In many cases the STI regions 107 are formed using oxidedepositions on the substrate 105. A p+ doped region 109, as well as n+doped regions 122 are formed are formed on the substrate 105. Apolysilicon conductor (PC) 128 may be formed above a gate oxide region(GOX) 129 on the substrate 105 to form the gate region 126 of the FET.In some embodiments, the polysilicon conductor (PC) may be replaced witha metal conductor. That is, in some embodiments, PC may refer to thegate electrode, wherein in other embodiments, PC may refer to a metalconductor operating as a gate electrode. A contact region (CA) 110 maybe formed above the doped n+ region for a source region 121. Similarly,another CA 110 may be formed above an n+ region for a drain region 131.

Further, a CA 110 may be formed above another n+ region and another CA110 may be formed above the p+ doped region 109. Together, p+ region 109and the n+ region provide for a PN junction for forming a diode region116. A test substrate pad 115 may be connected to the contact 110, whichmay form a circuit connection to the anode terminal of the diode 116. Atest pad 120 may be connected to the source 121, a test pad 125 may beconnected to the gate 126, and a test pad 130 may be connected to thedrain of the transistor. The circuit provided by the structureillustrated in FIG. 1 is depicted in FIG. 2.

FIG. 2 illustrates a stylized prior art circuit diagram of the structureprovided by the structure of FIG. 1. As described above, the structureof FIG. 1 comprises a transistor that is connected to a diode formed toprovide protection from plasma process charges, as described above. Thestructure of FIG. 1 comprises a gate 220 and protection diode 210 thatis connected to the gate node 127, such that the diode 210 is connectedin parallel to the gate 220. The protection diode 210 is used to reducethe plasma processing-induced charge damage of the gate dielectricduring the fabrication process. One of the problems associated with theprior art solution using the protection diode includes diode leakageproblems. When performing testing of the transistor, measuring gateleakage may become inaccurate due to the diode leakage. Further, anyvariations in the pitch of the formations during processing can lead tosignificant diode leakage using the state of the art process.

The present disclosure may address and/or at least reduce one or more ofthe problems identified above.

SUMMARY OF THE INVENTION

The following presents a simplified summary of the invention in order toprovide a basic understanding of some aspects of the invention. Thissummary is not an exhaustive overview of the invention. It is notintended to identify key or critical elements of the invention or todelineate the scope of the invention. Its sole purpose is to presentsome concepts in a simplified form as a prelude to the more detaileddescription that is discussed later.

Generally, the present disclosure is directed to various methods,apparatus and system for forming a device comprising a transistorcomprising an active gate and at least one inactive gate in parallel tothe active gate. A source region on a substrate is formed. An activegate region is formed on the substrate adjacent the source region. Adrain region is formed on the substrate adjacent the active gate region.A first inactive gate region is formed on the substrate in parallel tothe active gate region. The source region, the drain region, the activegate region, and the first inactive gate region comprise the transistor.The first inactive gate region is capable of dissipating at least aportion of a charge.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure may be understood by reference to the followingdescription taken in conjunction with the accompanying drawings, inwhich like reference numerals identify like elements, and in which:

FIG. 1 depicts a stylized depiction of a prior art integrated circuitdevice comprising a transistor;

FIG. 2 illustrates a stylized, equivalent prior art circuit diagram ofthe structure of FIG. 1;

FIG. 3 depicts a stylized depiction of an integrated circuit devicecomprising a transistor with one or more inactive or dummy gates, inaccordance with some embodiments herein;

FIG. 4 illustrates a stylized equivalent circuit diagram of thestructure of FIG. 3 in accordance with some embodiments herein;

FIG. 5 illustrates a stylized representation of an equivalent circuitryof an active gate and a plurality of capacitances relating to inactivegates, in accordance to some embodiments herein;

FIG. 6 illustrates a stylized depiction of an integrated circuit devicecomprising a transistor with one or more inactive or dummy gates, inaccordance with an first alternative embodiment;

FIG. 7 illustrates a stylized depiction of an integrated circuit devicecomprising a transistor with one or more inactive or dummy gates, inaccordance with a second alternative embodiment;

FIG. 8 illustrates a stylized depiction of an integrated circuit devicecomprising a transistor with one or more inactive or dummy gates, inaccordance with a third alternative embodiment;

FIG. 9 illustrates a system in accordance for processing a semiconductorwafer for forming an integrated circuit, in accordance with someembodiments herein;

FIG. 10 illustrates a flowchart depiction of a method for fabricating anintegrated device comprising an inactive gate, in accordance withembodiments herein;

FIG. 11 illustrates a stylized representation of a substrate layoutcomprising metal lines formed for manufacturing a transistor, inaccordance with a standard layout and

FIG. 12 illustrates a stylized representation of a substrate layoutcomprising metal lines formed for manufacturing a transistor, inaccordance with a layout with respect to embodiments herein.

While the subject matter disclosed herein is susceptible to variousmodifications and alternative forms, specific embodiments thereof havebeen shown by way of example in the drawings and are herein described indetail. It should be understood, however, that the description herein ofspecific embodiments is not intended to limit the invention to theparticular forms disclosed, but on the contrary, the intention is tocover all modifications, equivalents, and alternatives falling withinthe spirit and scope of the invention as defined by the appended claims.

DETAILED DESCRIPTION

Various illustrative embodiments of the invention are described below.In the interest of clarity, not all features of an actual implementationare described in this specification. It will of course be appreciatedthat in the development of any such actual embodiment, numerousimplementation-specific decisions must be made to achieve thedevelopers' specific goals, such as compliance with system-related andbusiness-related constraints, which will vary from one implementation toanother. Moreover, it will be appreciated that such a development effortmight be complex and time-consuming, but would nevertheless be a routineundertaking for those of ordinary skill in the art having the benefit ofthis disclosure.

The present subject matter will now be described with reference to theattached figures. Various structures, systems and devices areschematically depicted in the drawings for purposes of explanation onlyand so as to not obscure the present disclosure with details that arewell known to those skilled in the art. Nevertheless, the attacheddrawings are included to describe and explain illustrative examples ofthe present disclosure. The words and phrases used herein should beunderstood and interpreted to have a meaning consistent with theunderstanding of those words and phrases by those skilled in therelevant art. No special definition of a term or phrase, i.e., adefinition that is different from the ordinary and customary meaning asunderstood by those skilled in the art, is intended to be implied byconsistent usage of the term or phrase herein. To the extent that a termor phrase is intended to have a special meaning, i.e., a meaning otherthan that understood by skilled artisans, such a special definition willbe expressly set forth in the specification in a definitional mannerthat directly and unequivocally provides the special definition for theterm or phrase.

Embodiments herein provide a protection circuit for reducing ordissipating charge from external sources (e.g., charge from plasmaprocessing) in an integrated circuit (e.g., transistor). Embodimentsherein provide one or more inactive, “dummy,” or “phantom” gates for atransistor, wherein such gates may be capable of dissipating chargeexperienced by the transistor. In some embodiments, the inactive gatesmay be formed in parallel to the active gate of the transistor. In oneembodiment, the term “active” gate refers to the gate that operates withsource and drain to form a transistor.

The inactive/dummy gates provide protection for the circuitry and/or thedielectric portions of the transistor. The transistor may experienceexternal charge from one or more of a number of sources (e.g., externalelectrical field, plasma charge from plasma processing, etc.). Theinactive gates may be capable of dissipating parasitic charges. As anexample, plasma charge may leak into the substrate through the activeand inactive gates. The inactive gates may comprise equivalentcapacitances that may be capable of providing discharge capability fordischarging charges caused by external sources, e.g., charges fromplasma processing. Embodiments herein provide for utilizing equivalentcapacitor(s) from inactive/dummy gate(s) in place of a protection diodefor dissipating charges from external sources.

Further, embodiments herein provide for more flexible antenna rules. Forexample, embodiments herein provide for a flexible ratio for the signalline of the gate of a transistor. Antenna rules are provided to expressthe allowable ratio of metal area to gate area. The ratio is based onthe total metal connected to the gate without connections to the sourceand the drain, to the amount of gate area. In some embodiments, theantenna ratio is a function of the amount of metal connection to thegate of a transistor and the gate oxide area. Utilizing theinactive/dummy gate provided by embodiments herein, the antenna ratiomay be defined by Equation 1:

Ant. Ratio=(Metal Connc. to gate)/(active gate+dummy gate oxidearea);  Eq. 1

wherein the antenna ratio for a transistor may be adjusted based uponthe number of dummy or inactive gates. The antenna ratio (ant. Ratio) ofEquation 1 equals to the amount of metal connection to the gate dividedby the total gate area, which includes the sum of the active gate areaand the dummy gate regions. That is, the greater the number of dummy orinactive gates, the greater the flexibility with regard to the antennaratio. In one embodiment, the antenna ratio may be specified in terms ofimpedance. Using embodiments herein, transistors may be formed with apredetermined number of inactive/dummy gates to accommodate apredetermined antenna ratio.

Turning now to FIG. 3, a stylized depiction of an integrated circuitdevice comprising a transistor with one or more inactive or dummy gates,in accordance with some embodiments herein, is illustrated. FIG. 3illustrates a field-effect transistor (FET) that is formed on asubstrate 105, e.g., a p-type silicon substrate. Various shallow trenchisolation (STI) 107 regions are formed on the substrate 105. Various STIregions 107 may be formed using oxide depositions within the substrate105. In order to form a device, such as a transistor, at least one p+doped region 109, as well as n+ doped regions 122 are formed within thesubstrate 105.

A plurality of gate regions may be formed on the substrate 105. In oneembodiment, one active gate and one or more inactive or dummy gates areformed on the substrate 105. In order to form the plurality of gatesstructures, a plurality of polysilicon conductors (PC) 128 may be formedabove respective gate oxide regions (GOX) 129. The active gate 145 isformed adjacent a source region 121 and a drain region 131. In thismanner an active gate region 145 is formed, along with dummy gatesregions 140. The example of FIG. 3 illustrates an active gate region 145and four dummy gate regions 140. The number of dummy gate regions 140that are formed may be tailored to the desired antenna ratio. Forexample, if a lower antenna ratio is desired, a larger number of dummygate regions 140 may be formed (see Equation 1 above).

A contact region (CA) 110 may be formed above the doped n+ region 110adjacent the active gate 145 in order to form the source region 121 ofthe transistor. Similarly another CA 110 may be formed on an n+ region110 adjacent the active gate region 145 in order to form a drain region131 of the transistor. Further, a CA 110 may be formed above the p+doped region 109. A test substrate pad 115 may be connected to thecontact 110. A source test pad 120 may be connected to the source region121, a drain test pad 130 may be connected to the drain region 131, anda gate test pad 125 may be connected to the dummy gates 140 as well asto the active gate 145. The equivalent circuit provided by the structureillustrated in FIG. 3 is depicted in FIG. 4.

Turning now to FIG. 4, a stylized equivalent circuit diagram of thestructure of FIG. 3 in accordance with some embodiments herein, isillustrated. As indicated in FIG. 4, the structure of FIG. 3 comprisesan active gate 420 that corresponds to the PC and GOX structuresindicated by reference number 145 in FIG. 3. Moreover, FIG. 4 also showsa first inactive or dummy gate 430 and a second dummy gate 432. Thedummy gates 430, 432 correspond to the PC and GOX structures indicatedby the reference number 140 in FIG. 3. As indicated in FIG. 4, theinactive or dummy gates 460, 432 are positioned in parallel to theactive gate 420. Only two dummy gates are illustrated for clarity,however, those skilled in the art would appreciate that additional dummygates may be added and remain within the spirit and scope of embodimentsherein.

The inactive or dummy gates 430, 432 may provide protection from charge,such as plasma processing charges. The inactive or dummy gates 430, 432,although not active in the circuit with respect to transistor-specificoperations, may dissipate at energy from charge experienced by thecircuit from one of various sources. Plasma processing may cause thesubstrate 105 to experience charge during processing. The dummy gates430, 432, may dissipate at least a portion of these charges. In somecases, after the circuit formed on the substrate 105 and are distributedfor usage, energy from external sources (electrical field) may cause thecircuit to experience excessive charge. The dummy gate 430, 432 maydissipate at least a portion of these charges.

Moreover, the dummy gates 430, 432 are capable of providing flexibilityin antenna rules associated with the manufacturing of transistors. Apredetermined antenna ratio can be implemented when manufacturingtransistors in the manner described herein. For example, if additionalmetal connections are desired in the transistor, a predetermined antennamay be maintained by increasing the number of dummy transistors that areformed. In this manner, the manufacturing of transistors may beinfluenced by the context in which the transistors may be tested or usedin circuits, wherein higher or lower number of dummy transistors may beformed based upon the testing or usage context.

Turning now to FIG. 5, a simplified, stylized representation of anequivalent circuitry of an active gate and a plurality of capacitancesrelating to inactive gates, in accordance to some embodiments, isillustrated. In one embodiment, external charge experienced by atransistor may be dissipated (at least in part) by the equivalentcapacitance of an inactive/dummy gate. FIG. 5 illustrates an active gate420 in parallel with: a first capacitance C₁ and a first resistance R₁,which represents an equivalent capacitance and resistance of a firstdummy gate; a second capacitance C₂ and a second resistance R₂, whichrepresents an equivalent capacitance and resistance of a second dummygate; a third capacitance C₃ and a third resistance R₃, which representsan equivalent capacitance and resistance of a third dummy gate, throughan n^(th) capacitance C_(n) and an n^(th) resistance R_(n), whichrepresents an equivalent capacitance and resistance of an n^(th) dummygate.

The exemplary circuit of FIG. 5 may experience a charge-induced voltage(e.g., caused by a plasma process or an external electrical field)relative to a reference ground. Each of capacitor associated with adummy gate (e.g., 1^(st) dummy gate) may be capable of dissipating atleast a portion of a charge-induced voltage. The oxide voltage (Vox) maybe determined by the plasma charge collected by a particular gate, asindicated by Equation 2.

Vox=Q/Cox;  Eq. 2

wherein, Q is the plasma charge collected by a gate and Cox is the oxidecapacitance. Generally, the dissipation of the plasma charge is drivenby the tunneling current through the equivalent gate capacitor. Forexample, the tunneling current, Ig, may be modeled using a power lawcharacteristic defined by Equation 3.

Ig=Gate Area*pre-factor*(Vox)^(α)  Eq. 2

The higher the tunneling current, Ig, the greater the dissipation of theplasma charge. Therefore, a greater number of dummy gates would resultin a larger amount of tunneling current that would be able to dissipateplasma charge. The oxide voltage Vox in equilibrium will occur when theplasma current is equal to the tunneling current of the active gates incombination with the dummy gates. Similarly, the 2^(nd) through n^(th)dummy gates may also contribute to the dissipation of the charge-inducedvoltage in a similar fashion. Therefore, the greater the number ofinactive/dummy gates, the greater is the ability of the transistor todissipate charge-induced energy. Accordingly, the greater the number ofinactive/dummy gates, the higher the electrical protection afforded tothe transistor.

Turning now to FIG. 6, a stylized depiction of an integrated circuitdevice comprising a transistor with one or more inactive or dummy gates,in accordance with a first alternative embodiment, is illustrated. FIG.6 illustrates a FET that is formed on a substrate 105, e.g., a p-typesilicon substrate, similar to the substrate illustrated in FIG. 3.Various shallow trench isolation (STI) 107 regions are formed on thesubstrate 105. Various STI regions 107 may be formed using oxidedepositions on the substrate 105. In order to form a device, such as atransistor, at least one p+ doped region 109, as well as n+ dopedregions 122 are formed are formed on the substrate 105.

A plurality of gate regions may be formed on the substrate 105. In oneembodiment, one active gate and one or more inactive or dummy gates areformed on the substrate 105. Similar to the substrate descriptions withrespect to FIG. 3 provided above, in order to form the plurality ofgates, a plurality of polysilicon conductors (PC) 128 may be formedabove respective gate oxide regions (GOX) 129. An active gate region 145and inactive, dummy gates regions 140 are formed on the substrate 105.An active gate region 145 and four dummy gate regions 140 may be formedon the substrate 105. However, in as shown in FIG. 6, at the regionsadjacently beneath the inactive gates 140, instead of forming n+ dopedregions as exemplified in FIG. 3, STI areas are formed instead. Reducingthe doped n+ regions in the substrate 105 may provide for less chargecarriers, which may result in lower leakage currents.

A contact region (CA) 110 may be formed above the doped n+ region 110 toform a source region 121 of the transistor. Similarly, another CA 110may be formed on an n+ region 110 to form a drain region 131 of thetransistor. Further, a CA 110 may be formed above the p+ doped region109. A test substrate pad 115 may be connected to the contact 110. Asource test pad 120 may be connected to the source region 121, a draintest pad 130 may be connected to the drain region 131, and a gate testpad 125 may be connected to the dummy gates 140 as well as to the activegate 145. The test pads 115, 120, 125, and 130 may be connected to testcircuitry to perform various tests relating to the operation of thetransistor. The circuit provided by the structure illustrated in FIG. 6is similar to the circuit depicted in FIG. 4.

The total number of dummy gate regions 140 that are formed may betailored to the desired antenna ratio. For example, if a lower antennaratio is desired, a larger number of dummy gate regions 140 may beformed (see Equation 1 above).

Turning now to FIG. 7, a stylized depiction of an integrated circuitdevice comprising a transistor with one or more inactive or dummy gates,in accordance with a second alternative embodiment, is illustrated. Thesubstrate 105 and the features formed on the substrate 105 of FIG. 7 aresimilar to the features formed on the substrate illustrated in FIG. 3.However, the inactive/dummy gates 140 formed on the substrate 105 ofFIG. 7 are formed beyond the STI features 710 and 720. As shown in FIG.8, the inactive gates 140 of FIG. 7 are isolated between STI features,which may provide for a reduction in leakage currents. The circuitprovided by the structure illustrated in FIG. 7 is similar to thecircuit depicted in FIG. 4.

Turning now to FIG. 8, a stylized depiction of an integrated circuitdevice comprising a transistor with one or more inactive or dummy gates,in accordance with a third alternative embodiment, is illustrated. Thefeatures shown in FIG. 8 is similar to the features formed on thesubstrate illustrated in FIG. 3; however, the substrate 805 of FIG. 8 isan n-type substrate.

FIG. 8 illustrates a FET that is formed on an n-type substrate 805.Various shallow trench isolation (STI) 107 regions are formed on thesubstrate 105. In order to form a device, such as a transistor, a p+doped region 112, as well as n+ doped regions 111 are formed are formedon the substrate 105.

Similar to the circuit of FIG. 3, with regard to FIG. 8, a plurality ofgate regions may be formed on the substrate 805. In one embodiment, oneactive gate and one or more inactive or dummy gates are formed on thesubstrate 805. A contact region (CA) 110 may be formed above the dopedp+ region 112 to form a source region 121 of the transistor. Similarly,another CA 110 may be formed on a p+ region 112 to form a drain region131 of the transistor. Further, a CA 110 may be formed above the n+doped region 111. A test substrate pad 115 may be connected to thecontact 110. The source test pad 120 may be connected to the sourceregion 121, the drain test pad 130 may be connected to the drain region131, and the gate test pad 125 may be connected to the dummy gates 140as well as to the active gate 145. The circuit provided by the structureillustrated in FIG. 8 is similar to the circuit depicted in FIG. 4.

In an alternative embodiment, the active gate region 145 of FIG. 8 mayrepresent two gate regions separated by a dielectric layer, such as aninter-poly dielectric oxide-nitride-oxide (ONO). For example, the activegate region 145 may comprise a control gate over an inter-polydielectric ONO layer, which may be formed over a floating gate that isformed above a tunnel oxide layer over a silicon substrate. Thisarrangement may be used in Flash technology devices. In this embodiment,one or more inactive gate regions may be formed in parallel to bothgates that represent the “active gate” 145.

Turning now to FIG. 9, a system 900 for processing a semiconductor waferfor forming an integrated circuit, in accordance with some embodimentsherein, is illustrated. The system 900 may comprise a semiconductordevice processing system 910. The semiconductor device processing system910 may comprise various processing stations, such as etch processstations, photolithography process stations, CMP process stations, etc.

One or more of the processing steps performed by the processing system910 may be controlled by the processing controller 920. The processingcontroller 920 may be a workstation computer, a desktop computer, alaptop computer, a tablet computer, or any other type of computingdevice comprising one or more software products that are capable ofcontrolling processes, receiving process feedback, receiving testresults data, performing learning cycle adjustments, performing processadjustments, etc. The processing controller 920 is capable forcontrolling process steps to manufacture integrated circuits similar tothe manner exemplified in FIGS. 3 and 6-8.

The semiconductor device processing system 910 may produce integratedcircuits on a medium, such as silicon wafers. The processing system 910may provide processed integrated circuits/devices 915 on a transportmechanism 950, such as a conveyor system. In some embodiments, theconveyor system may be sophisticated clean room transport systems thatare capable of transporting semiconductor wafers. In one embodiment, thesemiconductor device processing system 910 may comprise a plurality ofprocessing sets, e.g., the 1^(st) process step, the 2^(nd) process set,etc., as described above.

In some embodiments, the items labeled “915” may represent individualwafers, and in other embodiments, the items 915 may represent a group ofsemiconductor wafers, e.g., a “lot” of semiconductor wafers. The system900 may also comprise a testing module for performing one or more testson the integrated circuit. For example, the pads (115, 120, 125, and130) described in FIGS. 3 and 6-8 may be attached to transistors formedby the processing system 910 for testing. Electrical signals may be sentand monitored via the pads (115, 120, 125, and 130) to test theoperation of the transistor. In some embodiments, feedback provided bythe testing module 930 may be used to adjust subsequent process steps toadjust the performance of transistors subsequently manufactured.

In some embodiments, the feedback may not be on an immediate,wafer-to-wafer basis, but may be based upon a lot-to-lot basis. Thetesting module 930 may also be capable of determining a change from onewafer to another within a lot. In many embodiments, the testing moduleprovides test data that may be used by the processing controller 920 tomodify one or more process parameters relating to a subsequent lot ofsemiconductor wafers.

In one embodiment, the system 900 may also comprise an inactive gateunit 940. The inactive gate unit 940 may be capable of determining thenumber of dummy/inactive gates that should be formed when manufacturingan integrated circuit, such as a transistor. The inactive gate unit 940unit may utilize various factors in determining the number of inactivegates that should be formed. For example, the desired antenna ratio maybe a factor in determining the number of inactive gates to be formed.Other factors include the antenna ratio requested by a customer of theintegrated circuit, the likely usage of the integrated circuits, etc.Other factors in determining the number of inactive gates to forminclude the amount of charge dissipation required by the likely exposureto external change-inducing sources that the integrated circuits willexperience. In some cases, feedback from the testing module 940 may beused to influence the number of inactive gates that may be formed.Various other factors known to those skilled in the art having benefitof the present disclosure may be used to determine the number ofinactive gates to form in an integrated circuit, and remain within thespirit and scope of the present invention. In an alternative embodiment,the inactive gate unit 940 may be integrated into the processingcontroller 920.

The system 900 may be capable of manufacturing and testing variousproducts that include transistors with active and inactive gatesinvolving various technologies. For example, the system 900 may providefor manufacturing and testing products relating to CMOS technology,Flash technology, BiCMOS technology, power devices, memory devices(e.g., DRAM devices), NAND memory devices, and/or various othersemiconductor technologies.

Turning now to FIG. 10, a flowchart depiction of a method forfabricating an integrated device comprising an inactive gate, inaccordance with embodiments herein is illustrated. An integratedcircuit, such as a transistor, is formed on a substrate (block 1010). Asexemplified above in FIG. 3, 6-8, various features, such as an n+ dopantregion, a p+ dopant region, gate oxide regions, metal formations, etc.,are formed on an p-type or an n-type substrate. When forming theintegrated circuit, e.g., transistor, a process of determining a numberof dummy/inactive gates to be formed is performed (block 1020).

The process of determining the number for inactive gates to be formedmay include determining the number of transistors on a device that wouldbenefit from protection provided by inactive gates (block 1022). Thesetransistors may be include critical transistors that may be intended forsensitive control or communications tasks. In some examples, thesecritical transistors may include the integrated circuit that may be usedin medical devices or critical communications; therefore, reliability ofthe transistors may be important. The number of inactive gates may alsobe determined using the desired, prescribed, or predetermined antennaratio (block 1024). In alternative embodiments, the number of inactivegates that are formed may influence antenna rules, e.g., relaxation ofantenna ratio.

In some cases, the customer of the processed device may specify largerantenna ratio tolerance, which may prompt the processing control toincrease the number of inactive gates that are formed. Using informationwith respect to determining the number of gates requiring protectionand/or the desired antenna ratio, the number of dummy/inactive to gateto be formed may be determined (block 1026). Further, the chargecarrier/leakage current or voltage parameters are determined (block1030). Based upon the number of gates determined in step 1020 and/or thecharge carrier/leakage parameters of step 1030, inactive gates areformed on the substrate along with the active gate (block 1040).

FIG. 11 illustrates a stylized representation of a substrate layoutcomprising metal lines formed for manufacturing a transistor, inaccordance with a standard layout. FIG. 12 illustrates a stylizedrepresentation of a substrate layout comprising metal lines formed formanufacturing a transistor, in accordance with a layout with respect toembodiments herein. Referring simultaneously to FIGS. 11 and 12,substrate layouts with one or more transistors are shown. FIGS. 11 and12 illustrate a substrate 1110 (e.g., p-type substrate) upon whichvarious structures are formed. For example, a plurality of horizontalmetal lines 1120 are formed across the substrate 1110. On another layera gate region 1130, a source region 1140, and a drain region 1150 may beformed in order to manufacture a transistor. Metal connections (e.g.,vias) may be formed to make appropriate connections to develop thesource, drain and gate region in order to form a transistor.

FIG. 11 illustrates a metal connection 1160 formed over the gate region1130, a metal connection 1170 formed over the source region 1140, and ametal connection 1180 formed over the drain region 1150. In this manner,a standard layout for a transistor is provided. In contrast, FIG. 12illustrates a metal connection 1165 over a plurality of metal lines overthe gate region 1130. However, a lesser number of metal connections overthe source and drain regions are provided in FIG. 12. In the exemplarylayout of FIG. 12, a plurality of metal connections 1170 are formed overa plurality of source regions 1140. Similarly, a plurality of metalconnections 1180 are formed over a plurality of drain regions 1140.These connections form a plurality of transistor.

As illustrated in FIG. 12, not all gate connections are used to formtransistors. FIG. 12 illustrates a greater number of gates regions thancorresponding source and drain regions. That is, FIG. 12 shows thatseveral gate regions do not have corresponding source and drain regions.These “unpaired” gate regions serve as dummy/inactive gates. The regionthat comprises metal connections 1160, 1170, 1180 over the gate, sourceand drain regions (1130, 1140, 1150) form active gates, as indicated bythe area labeled “Active Gates” in FIG. 12. The region that comprisesonly metal connection 1160 over the gate region 1130, but nocorresponding metal connections of the source and drain regions 1140,1150 form inactive or dummy gates, as indicated by the area labeled“Inactive/Dummy Gates” in FIG. 12. In this manner, active and inactivegates are formed on the substrate 1110 in accordance with embodimentsherein. The inactive gates provide for protection for the transistorsfrom various parasitic electrical characteristics, such as parasiticcharge.

The particular embodiments disclosed above are illustrative only, as theinvention may be modified and practiced in different but equivalentmanners apparent to those skilled in the art having the benefit of theteachings herein. For example, the process steps set forth above may beperformed in a different order. Furthermore, no limitations are intendedto the details of construction or design herein shown, other than asdescribed in the claims below. It is therefore evident that theparticular embodiments disclosed above may be altered or modified andall such variations are considered within the scope and spirit of theinvention. Accordingly, the protection sought herein is as set forth inthe claims below.

1. A method for forming a transistor, comprising: forming a sourceregion on a substrate; forming an active gate region on said substrateadjacent said source region; forming a drain region on said substrateadjacent said active gate region; and forming a first inactive gateregion on said substrate in parallel to said active gate region, whereinsaid source region, said drain region, said active gate region, and saidfirst inactive gate region comprise said transistor, and wherein saidfirst inactive gate region is capable of dissipating at least a portionof a charge.
 2. The method of claim 1, wherein said first inactive gateregion is further capable of at least partially dissipating said chargeresulting from a plasma process. 3.-8. (canceled)
 9. The method of claim1, further comprising forming a second inactive gate region on saidsubstrate in parallel to first inactive gate, wherein said secondinactive gate is capable of at dissipating said at least a portion ofsaid charge.
 10. (canceled)
 11. An integrated circuit device,comprising: a transistor, comprising: a source region on a substrate; anactive gate region on said substrate adjacent said source region; adrain region on said substrate adjacent said active gate region; and aninactive gate region on said substrate in parallel to said active gateregion, wherein said inactive gate region is capable of dissipating atleast a portion of a charge.
 12. The integrated circuit device of claim11, wherein said charge is at least one of a leaked charge from a plasmaprocess, or a charge from an external electrical field. 13.-16.(canceled)
 17. A system, comprising: a semiconductor device processingsystem to provide a device comprising at least one transistor, whereinsaid transistor comprises; a source region on a substrate; an activegate region on said substrate adjacent said source region; a drainregion on said substrate adjacent said active gate region; and aninactive gate region on said substrate in parallel to said active gateregion, wherein said inactive gate region is capable of dissipating saidat least a portion of a charge; and a processing controller operativelycoupled to said semiconductor device processing system, said processingcontroller configured to control an operation of said semiconductordevice processing system.
 18. The system of claim 17, furthercomprising: a testing module for testing said transistor, wherein saidtesting module is capable of providing an indication of a currentleakage in said transistor; an inactive gate unit to determine thenumber of inactive gate regions to form based upon at least one of saidindication of said current leakage, or a predetermine antenna ratio. 19.The system of claim 17, wherein said processing controller is capable ofcontrolling the number of inactive gates that are formed in a subsequentdevice formed by said semiconductor device processing system based uponat least one of data from said testing module, or data from saidinactive gate unit.
 20. The system of claim 17, wherein said device isat least one of a CMOS device, a BiCMOS device, a Flash device, a DRAMmemory device, and a power device.
 21. The system of claim 17, whereinsaid active gate comprises a plurality of gates stacked vertically andseparated by a dielectric layer.